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Pore characterization in low-k dielectric films using x-ray reflectivity : x-ray porosimetry / Christopher L. Soles [and others].
- Format:
- Book
- Government document
- Series:
- NIST special publication ; 960-13.
- NIST recommended practice guide
- Special publication ; 960-13
- Language:
- English
- Subjects (All):
- Dielectric films.
- Porosity.
- porosity.
- Genre:
- technical reports.
- Technical reports
- Technical reports.
- Physical Description:
- 1 online resource (xiii, 58 pages) : illustrations
- polychrome.
- Place of Publication:
- [Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2004]
- System Details:
- text file
- Notes:
- Title from title screen (viewed on May 3, 2007).
- "June 2004."
- Includes bibliographical references (pages 55-58).
- OCLC:
- 124076434
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