2 options
Environmental technology initiative--chemical-free cleaning of semiconductors by the radiance process / by Ronald N. Legge [and others].
- Format:
- Book
- Government document
- Author/Creator:
- Legge, Ronald N.
- Language:
- English
- Subjects (All):
- Semiconductors--Cleaning--Technological innovations--United States.
- Semiconductors.
- United States.
- Physical Description:
- 1 online resource
- Place of Publication:
- [Cincinnati, OH] : U.S. Environmental Protection Agency, Office of Research and Development, National Risk Management Research Laboratory, [1998]
- Notes:
- Title from title screen (viewed September 22, 2003).
- "September 1998."
- "EPA/600/R-98/153."
- Includes bibliographical references.
- OCLC:
- 53064031
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