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Nanoscale standards by metrological AFM and other instruments / Ichiko Misumi.
- Format:
- Book
- Author/Creator:
- Misumi, Ichiko, author.
- Series:
- IOP Ebooks Series
- Language:
- English
- Subjects (All):
- Nanotechnology.
- Physical Description:
- 1 online resource (91 pages)
- Edition:
- First edition.
- Place of Publication:
- Bristol, England : IOP Publishing, [2021]
- Summary:
- This book reviews nanometrological standards before proceeding to detail pitch, step height, line width, nanoparticle size, and surface roughness. Essential for users making quantitative nanoscale measurements, in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications.
- Notes:
- Description based on publisher supplied metadata and other sources.
- Description based on print version record.
- ISBN:
- 9780750344364
- 0750344369
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