Application of diffractive lens arrays in confocal microscopy / Zheng Li.

Format:

Book

Author/Creator:

Li, Zheng, author.

Series:

Schriftenreihe automatische Sichtprüfung und Bildverarbeitung

Language:

English

Subjects (All):

Confocal microscopy.

Fluorescence microscopy.

Physical Description:

1 online resource (xv, 148 pages) : illustrations

Place of Publication:

Karlsruhe : KIT Scientific Publishing, [2022]

Summary:

Diffractive lens arrays are proposed in this work for application in reflected-light confocal microscopes. They have overcome the limitations between fields of view and resolution of traditional objectives. Experiments of multi-spot confocal imaging in surface metrology and fluorescence microscopy have been demonstrated based on the proposed concepts, which have shown capabilities of high-resolution measurement over a large area.

Contents:

Abstract

Kurzfassung

Acknowledgements

Notation

Acronyms

1 Introduction

1.1 Motivation

1.2 Related work

1.3 Main contributions

1.4 Thesis outline

2 Theoretical Background

2.1 Diffraction simulation

2.1.1 Maxwell's equations

2.1.2 Scalar approximation and solutions

2.1.3 Numerical implementation

2.2 Theory of confocal microscopy

2.2.1 Focusing by a thin lens

2.2.2 PSF of a thin lens

2.2.3 PSF of a confocal scanning microscope

3 Design and Simulation

3.1 See-through DLA design

3.1.1 System overview

3.1.2 Design process

3.1.3 Simulation and optimization

3.2 Direct-imaging DLA design

3.2.1 System overview

3.2.2 Design process

3.2.3 Simulation and optimization

4 Experiment Results

4.1 Spot characterization

4.1.1 Spot measurement of See-through DLAs

4.1.2 Spot measurement of Direct-imaging DLAs

4.2 Lateral measurement

4.2.1 Lateral measurement by See-through DLAs

4.2.2 Lateral measurement by Direct-imaging DLAs

4.3 Axial measurement

4.3.1 Axial response of See-through DLAs

4.3.2 Axial response of Direct-imaging DLAs

4.3.3 Interference measurement by See-through DLAs

4.3.4 Measurement of a step height target

4.4 Fluorescence measurement

5 Conclusions

5.1 Summary of the work

5.2 Outlook

Bibliography

Publications

Appendix

A Kirchhoff's Diffraction Formulation.

Notes:

Description based on: online resource; title from PDF information screen (Worldcat, viewed March 30, 2023).