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Sputtering by Particle Bombardment II [electronic resource] : Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography / edited by R. Behrisch.
- Format:
- Book
- Series:
- Topics in Applied Physics, 0303-4216 ; 52
- Language:
- English
- Subjects (All):
- Solid state physics.
- Spectrum analysis.
- Microscopy.
- Solid State Physics.
- Spectroscopy and Microscopy.
- Local Subjects:
- Solid State Physics.
- Spectroscopy and Microscopy.
- Physical Description:
- 1 online resource (XIII, 394 p.)
- Edition:
- 1st ed. 1983.
- Other Title:
- With contributions by numerous experts
- Place of Publication:
- Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1983.
- Language Note:
- English
- Contents:
- and overview
- Sputtering of multicomponent materials
- Chemical sputtering
- Sputtering by electrons and photons
- Sputtering of solids with neutrons
- Heavy ion sputtering induced surface topography development
- Development of surface topography due to gas ion implantation.
- Notes:
- Bibliographic Level Mode of Issuance: Monograph
- ISBN:
- 3-540-38659-9
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