1 option
Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant.
- Format:
- Book
- Author/Creator:
- Van Zant, Peter, author.
- Series:
- McGraw-Hill's AccessEngineering
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction.
- Semiconductors.
- Integrated circuits--Design and construction.
- Integrated circuits.
- Semiconductor industry.
- Semiconductors--Materials.
- Chemicals.
- Crystal growth.
- Semiconductor wafers.
- Semiconductors--Defects.
- Contamination (Technology).
- Industrial productivity.
- Oxidation.
- Microelectronics.
- Microlithography.
- Photolithography.
- Semiconductor doping.
- Semiconductor films.
- Thin films.
- Surfaces (Technology).
- Metallizing.
- Semiconductor waters--Design and construction.
- Semiconductor waters.
- Electronic packaging.
- Genre:
- Electronic books.
- Internet resources.
- Physical Description:
- 1 online resource (1 electronic text (xiii, 642 pages)) : illustrations.
- Edition:
- 5th ed.
- Place of Publication:
- New York : McGraw-Hill, [2004]
- Biography/History:
- Contributor biographical information: http://www.loc.gov/catdir/bios/mh051/2004040287.html
- Contents:
- http://www.loc.gov/catdir/toc/mh051/2004040287.html
- Notes:
- Print version c2004.
- Includes bibliographical references and index.
- Description based on cover image and table of contents, viewed on April 25, 2007.
- Contains:
- Semiconductor industry.
- Properties of semiconductor materials and chemicals.
- Crystal growth and silicon wafer preparation.
- Overview of wafer fabrication.
- Contamination control.
- Productivity and process yields.
- Oxidation.
- Ten-step patterning process-surface preparation to exposure.
- Ten-step patterning process-developing to final inspection.
- Advanced photolithography processes.
- Doping.
- Layer deposition.
- Metallization.
- Process and device evaluation.
- Business of wafer fabrication.
- Introduction to devices and integrated circuit formation.
- Introduction to integrated circuits.
- Packaging.
- ISBN:
- 0071450211
- 9780071432412
- Access Restriction:
- Restricted for use by site license.
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.