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MOEMS and Miniaturized Systems XXIII / Hans Zappe, Wibool Piyawattanametha, Yong-Hwa Park, editors.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Miniature electronic equipment--Congresses.
- Miniature electronic equipment.
- Physical Description:
- 1 online resource
- Place of Publication:
- Bellingham, Washington : SPIE, 2024.
- Contents:
- Front Matter: Volume 12899 (1)
- Tunable Optical Components I (1)
- Tunable Optical Components II (2)
- Spectrometers (4)
- LIDAR and 3D Imaging (4)
- Micromirrors and Scanners (5)
- Novel Materials, Processes, and Devices (3)
- Poster Session (7).
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5106-7059-9
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