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Metrology, Inspection, and Process Control. XXXVIII / edited by Matthew J. Sendelbach, Nivea G. Schuch.
- Format:
- Book
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; ; volume 12955
- Language:
- English
- Subjects (All):
- Process control.
- Metrology--Congresses.
- Metrology.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Bellingham, Washington : Society of Photo-Optical Instrumentation Engineers (SPIE), 2024.
- Contents:
- Front Matter: Volume 12955
- Opening Remarks and Keynote Session
- Materials Characterization and Metrology
- Optical Metrology and Inspection
- Metrology for Advanced Logic
- EPE and Overlay
- Machine Learning
- 3D Profile/Shape Metrology
- Electron Beam Metrology I
- Inspection
- Electron Beam Metrology II and Karel Urbánek Best Student Paper Award Presentation
- 3D and Heterogeneous Integration
- Late Breaking News
- Poster Session.
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5106-7217-6
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