Fundamentals of Microelectromechanical Systems (MEMS) / Eun Sok Kim.

Format:

Book

Author/Creator:

Kim, Eun Sok, author.

Language:

English

Subjects (All):

Microelectromechanical systems.

Microelectronics--Materials.

Microelectronics.

Genre:

Electronic books.

Physical Description:

1 online resource

Edition:

First edition.

Place of Publication:

New York, N.Y. : McGraw-Hill Education, [2021].

Language Note:

In English.

Summary:

This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design.

Contents:

Cover

Title Page

Copyright Page

Dedication

Contents

Preface

Introduction

1 Basic Microfabrication

1.1 Introduction

1.2 Photolithography

1.3 Thermal Oxidation of Silicon

1.4 Silicon Doping

1.5 Vacuum Basics

1.6 Thin-Film Depositions

1.7 Mass Flow Sensing and Control

1.8 Electroplating of Metals

1.9 Soft Lithography and Its Derivative Technology

1.10 Wafer Bonding

1.11 Flip-Chip Bonding for Electrical Interconnect

1.12 Engineered Silicon Substrates

References

Questions and Problems

2 Micromachining

2.1 Bulk Micromachining

2.2 Surface Micromachining

2.3 Dry Micromachining

3 Transduction Principles

3.1 Electrostatic and Capacitive Transduction

3.2 Electromagnetic Transduction

3.3 Piezoelectric Transduction

3.4 Thermal Transduction

4 RF MEMS

4.1 Electromagnetic Wave Spectrum

4.2 Silicon Micromechanical Resonator

4.3 Acoustic Wave Resonators and Filters

4.4 Surface Acoustic Wave Filters

4.5 Tunable Capacitors

4.6 RF MEMS Switches

Questions

5 Optical MEMS

5.1 Micromirror Array for Projection Display

5.2 Micromirrors for Optical Fiber Communication

6 Mechanics and Inertial Sensors

6.1 Statics

6.2 Dynamics

6.3 MEMS Accelerometers

6.4 Vibratory Gyroscopes

7 Thin-Film Properties, SAW/BAW Sensors, Pressure Sensors, and Microphones

7.1 Thin-Film Residual Stress

7.2 Piezoelectric Films

7.3 Material Properties Expressed as Tensor

8 Microfluidic Systems and Bio- MEMS

8.1 Microchannels and Droplet Formation

8.2 Microvalves

8.3 Micropumps

8.4 Micromixers

8.5 Lab-on-Chip

9 Power MEMS

9.1 Electromagnetic Vibration Energy Harvesting

9.2 Piezoelectric Vibration Energy Harvesting

9.3 Power Generation from Vibration Associated with Human?s Walk

10 Electronic Noises, Interface Circuits, and Oscillators

10.1 Input Referred Noise

10.2 Voltage Amplifier versus Charge Amplifier for Piezoelectric Sensors

10.3 Electromagnetic Interference

10.4 Poles and Zeros

10.5 Design and Analysis of Oscillators Based on Bulk Acoustic-Wave Resonators

Index.

Notes:

Includes bibliographical references and index.

Electronic reproduction. New York, N.Y. : McGraw Hill, 2021. Mode of access: World Wide Web. System requirements: Web browser. Access may be restricted to users at subscribing institutions.

Description based on e-Publication PDF.

Other Format:

Print version: Fundamentals of Microelectromechanical Systems (MEMS).

ISBN:

9781264257591 (e-ISBN)

1264257597 (e-ISBN)

9781264257584 (print-ISBN)

1264257589 (print-ISBN)

Access Restriction:

Restricted for use by site license.