Synthesis of Carbon-based and Metal-Oxide Thin Films using High Power Impulse Magnetron Sputtering.

Format:

Book

Author/Creator:

Aijaz, Asim.

Series:

Linköping Studies in Science and Technology. Dissertations

Linköping Studies in Science and Technology. Dissertations ; v.1572

Language:

English

Subjects (All):

Magnetron sputtering.

Thin films.

Physical Description:

1 online resource (98 pages)

Edition:

1st ed.

Other Title:

Linköping Studies in Science and Technology. Dissertations

Place of Publication:

Linköping : Linköping University Electronic Press, 2014.

Summary:

This dissertation by Asim Aijaz explores the synthesis of carbon-based and metal-oxide thin films using high power impulse magnetron sputtering (HiPIMS). The work is divided into two parts, focusing on the deposition of carbon-based and metal-oxide thin films. For carbon-based films, strategies were developed to enhance the degree of carbon ionization and deposition rates. This includes using a higher ionization potential buffer gas and coupling HiPIMS with direct current magnetron sputtering (DCMS). For metal-oxide films, the study investigates reactive HiPIMS discharges for systems like Ti-O and Al-O, and their influence on film properties such as phase composition and optical characteristics. The dissertation targets researchers and professionals in the fields of material science and plasma physics, providing insights into advanced film deposition techniques and their applications. Generated by AI.

Contents:

Intro

Abstract

Populärvetenskaplig sammanfattning

Preface

Appended Papers

Contribution to the appended papers

Other Publications

Conference contributions

Acknowledgements

Contents

Chapter 1 Introduction

Chapter 2 Basic Plasma Physics

Chapter 3 Thin Film Deposition Processes

Chapter 4 Thin Films Growth and Materials Systems

Chapter 5 Plasma and Thin Film Characterization

Chapter 6 Summary and contribution to the field

Chapter 7 Additional results and future outlook

References.

Notes:

Description based on publisher supplied metadata and other sources.

Part of the metadata in this record was created by AI, based on the text of the resource.

ISBN:

9789175194080

9175194082

OCLC:

927227407