Metastable ScAlN and YAlN Thin Films Grown by Reactive Magnetron Sputter Epitaxy.

Format:

Book

Author/Creator:

Žukauskaitė, Agnė.

Series:

Linköping Studies in Science and Technology. Dissertations

Linköping Studies in Science and Technology. Dissertations ; v.1564

Language:

English

Subjects (All):

Piezoelectric materials.

Thin films.

Physical Description:

1 online resource (81 pages)

Edition:

1st ed.

Other Title:

Linköping Studies in Science and Technology. Dissertations

Place of Publication:

Linköping : Linköping University Electronic Press, 2014.

Summary:

This dissertation explores the synthesis and characterization of metastable thin films of ScAlN and YAlN, focusing on their structural, electrical, optical, and mechanical properties. Utilizing reactive magnetron sputter epitaxy, the study investigates the effects of varying scandium and yttrium concentrations on the piezoelectric and other material properties. The research highlights the potential for enhanced piezoelectric responses and improved crystalline quality by adjusting growth temperatures and material compositions. The findings provide insights into creating new materials with advanced functionalities, with implications for technological applications such as thin film bulk acoustic wave resonators. This work is intended for researchers and professionals in material science and thin film technology. Generated by AI.

Contents:

Intro

Abstract

Populärvetenskaplig sammanfattning

Preface

Acknowledgements

Included papers

Related papers

Table of contents

Chapter 1 Introduction

Chapter 2 Materials

Chapter 3 Growth

Chapter 4 Modeling

Chapter 5 Characterization

Chapter 6 Summary of included papers

Chapter 7 Contribution to the field

Chapter 8 Future work

Chapter 9 References.

Notes:

Description based on publisher supplied metadata and other sources.

Part of the metadata in this record was created by AI, based on the text of the resource.

ISBN:

9789175194349

9175194341

OCLC:

927227331