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MEMS Applications in Electronics and Engineering Aviru Kumar Basu; Adreeja Basu; Sagnik Ghosh; Shantanu Bhattacharya: Edited by Aviru Kumar Basu; Adreeja Basu; Sagnik Ghosh; Shantanu Bhattacharya
- Format:
- Book
- Author/Creator:
- Basu, Aviru Kumar
- Language:
- English
- Physical Description:
- online resource (278 pages)
- Place of Publication:
- Melville, New York AIP Publishing 2023
- Summary:
- MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus. This timely and essential book: -- Builds knowledge for people working in other domains through its interdisciplinary approach -- Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications -- Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologies MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals.
- Contents:
- Introduction to MEMS Applications in Electronics and Engineering - Scaling Law - Recent Progress in Cantilever-Based Sensors: An Overview of Application and Fabrication Techniques - Recent Trends in CMOS-MEMS Sensors - Mechanics of Materials Considerations in MEMS-Based Medical Devices - Progress in RF MEMS/NEMS Switches - Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress - Emerging Trends in MEMS/NEMS Based Technologies for Gas Sensing Applications - MEMS-Based Energy Harvesting Devices: Overview of Recent Progress - Index.
- Other Format:
- Printed edition
- ISBN:
- 9780735424364
- 9780735424371
- 9780735424388
- Access Restriction:
- Restricted for use by site license.
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