MOEMS : micro-opto-electro-mechanical systems / Manouchehr E. Motamedi, editor.

Format:

Book

Contributor:

Motamedi, M. Edward, editor.

Society of Photo-Optical Instrumentation Engineers, publisher.

Series:

SPIE monograph ; PM126.

SPIE digital library

SPIE Press monograph ; PM126

Language:

English

Subjects (All):

Microelectromechanical systems.

Optoelectronic devices.

Microfabrication.

Genre:

Electronic books.

Physical Description:

1 online resource (xxi, 614 pages) : illustrations.

Place of Publication:

Bellingham, Washington : SPIE Press, 2005.

System Details:

Mode of access: World Wide Web.

System requirements: Adobe Acrobat Reader.

Summary:

This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

Contents:

Foreword / S. D. Senturia

Preface / M. E. Motamedi

Acknowledgments

Chapter 1. Introduction / Manouchehr E. Motamedi

Chapter 2. Microfabrication / Olga B. Spahn, S. Mani

Chapter 3. Micro-optics / H. P. Herzig, E.-B. Kley, M. Cumme, L. C. Wittig

Chapter 4. Actuation and sensing / Long Que, Yogesh B. Gianchandani

Chapter 5. Micro-optic components, testing, and applications / Manouchehr E. Motamedi and Johannes Schwider

Chapter 6. Fiber optic systems / Rolf Göring

Chapter 7. Optical scanners / Tarik Bourouina, Hiroyuki Fujita, M., Gilbert Reyne, and M. Edward Motamedi

Chapter 8. Display and imaging systems / Hakan Urey, David L. Dickensheets

Chapter 9. Adaptive optics / Scot S. Olivier

Chapter 10. MOEMS/MEMS CAD and simulation / Ridha Hamza, Jean Michel Karam, Philippe Nachtergaele

Chapter 11. MEMS and MOEMS packaging / Ajay P. Malshe, John Patrick O'Connor

Chapter 12. MOEMS and MEMS materials / William D. Cowan

Problems and exercises

Acronyms

Index.

Notes:

"SPIE Digital Library."--Website.

Includes bibliographical references and index.

Title from PDF title page (SPIE eBooks Website, viewed 2017-04-03).

Other Format:

Print version

ISBN:

9781510607873

OCLC:

985343096

Access Restriction:

Restricted for use by site license.