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Abbildende ellipsometrie mit lichtwegumkehrung für die optische charakterisierung von gekrümmten oberflächen / von Christian Emanuel Negara.
- Format:
- Book
- Author/Creator:
- Negara, Christian Emanuel, author.
- Series:
- Schriftenreihe automatische sichtprüfung und bildverarbeitung ; 1866-5934. band 21
- Schriftenreihe automatische sichtprüfung und bildverarbeitung, 1866-5934 ; band 21
- Language:
- German
- Subjects (All):
- Ellipsometry--Measurement.
- Ellipsometry.
- Surfaces (Technology)--Analysis--Optical methods.
- Surfaces (Technology).
- Thin films--Measurement.
- Thin films.
- Surfaces--Optical properties.
- Surfaces.
- Physical Description:
- 1 online resource
- Place of Publication:
- Karlsruhe : KIT Scientific Publishing, [2023]
- Summary:
- "Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work."--Publisher's website.
- Notes:
- Includes bibliographical references.
- Open access. This is an Open Access book distributed under the terms of the Creative Commons Attribution 4.0 license (unless stated otherwise), which permits unrestricted use, distribution and reproduction in any medium, provided the original work is properly cited. Copyright is retained by the author(s).
- Description based on website home page, viewed February 15, 2024.
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