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Modeling Aspects in Optical Metrology. IX / edited by Bernd Bodermann, Karsten Frenner.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Optical oceanography--Congresses.
- Optical oceanography.
- Optical mineralogy.
- Physical Description:
- 1 online resource : illustrations
- Place of Publication:
- Munich, Germany : SPIE, 2023.
- Contents:
- Front Matter: Volume 12619 (1)
- Workshop on Compressed Sensing (3)
- Optical Nanometrology and Ellipsometry (4)
- Interferometry and Phase (5)
- Optical Systems (3)
- Scatterometry and OCD Metrology (3)
- Super-resolution, Wave Propagation, and 3D (3)
- Joint Session (TracOptic) I: Modelling and Characterisation of Quantitative Microscopes (2)
- Joint Session (TracOptic) II: Modelling and Characterisation of Quantitative Microscopes (3)
- Poster Session (5).
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5106-6448-3
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