Measurement technology and intelligent instruments XI : selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments, (ISMTII 2013), July 1-3, 2013, Aachen, Germany / edited by Robert Schmitt and Harald Bosse.

Format:

Book

Conference/Event

Author/Creator:

International Symposium on Measurement Technology and Intelligent Instruments, Corporate Author.

Contributor:

Schmitt, Robert, editor.

Bosse, Harald, editor.

Conference Name:

International Symposium on Measurement Technology and Intelligent Instruments (11th : 2013 : Aachen, Germany)

Series:

Key engineering materials ; Volume 613.

Key Engineering Materials, 1662-9795 ; Volume 613

Language:

English

Subjects (All):

Engineering instruments--Congresses.

Engineering instruments.

Measuring instruments--Congresses.

Measuring instruments.

Physical Description:

1 online resource (491 p.)

Place of Publication:

Zürich, Switzerland : Trans Tech Publications, 2014.

Language Note:

English

Summary:

Collection of selected, peer reviewed papers from the 11 th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany. The 60 papers are grouped as follows: Chapter 1: Metrology for SI, Chapter 2: Position & Displacement Metrology, Chapter 3: Micro- and Nanometrology, Chapter 4: Macrometrology, Chapter 5: Optical Metrology, Chapter 6: Sensors and Actuators, Chapter 7: Material Properties' Characterization, Chapter 8: Intelligent Instruments for Automation, Chapter 9: Management of Measurement Processes, Chapter 10: Calibration

Contents:

Measurement Technology and Intelligent Instruments XI; Editorial; Table of Contents; Chapter 1: Metrology for SI; Revision of the SI: The Determination of the Avogadro Constant as the Base for the Kilogram; Characterizing the New Sphere Interferometer for the Diameter Determination of the Avogadro Spheres; New Avogadro Spheres for the Redefinition of the Kilogram; Recommendations for Unified Rules for Key Comparison Evaluation; Chapter 2: Position & Displacement Metrology; Reproducibility of a Nanometre Accurate Moving-Scale Measurement System

Error Separation and Dynamic Compensation Method in Coplanar Planar Grating Displacement Measurement SystemHighly-Stable Electronic Sensor Interface for Capacitive Position Measurement; Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer; Orthogonality Measurement of Cross-Grating Based on Image Processing of Multi-Order Diffraction Patterns; Research on a Long Travel Nanopositioning Air Bearing Stage with the Linear Motors; Chapter 3: Micro- and Nanometrology

Changing Technology Requirements of Mask Metrology in Semiconductor IndustryAutomated Tool for Measuring Nanotopography of 300 mm Wafers at early Stages of Wafer Production; Full Scale Calibration of a Combined Tactile Contour and Roughness Measurement Device; A Virtual Instrument for SEM Uncertainty Analysis; Chapter 4: Macrometrology; Super-Large Gear Measurement Using Laser Tracker and CMM; Experimental Performance Study of Industrial-Grade Coordinate Measuring Machines Using a Calibrated Production Workpiece; Analysis of a Big Joint Implant

High Stability of Temperature Control Using Vacuum Insulated Wall for Gauge Block MeasurementChapter 5: Optical Metrology; First Utilization of Energy Transfer in Structured Light Projection - Infrared 3D Scanner; High Precision Algorithms for 3D Objects Shadow Inspection in Partially Coherent Light; Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle; Realization of Non-Mechanical Lateral and Axial Confocal Microscopic Laser Scanning with a Phase only Liquid Crystal Spatial Light Modulator

An Approach to On-Line Uncertainty Evaluation in Non-Contact Temperature MeasurementsChapter 6: Sensors and Actuators; Design and Testing of Wind Energy Harvester Based on PVDF; Investigation of Energy Harvest Using a Piezoelectric Unimorph Post-Buckled by a Stretching Spring; Development of a Compact Deformable Mirror Using Push-Pull Actuators; Self-Diagnostics of Piezoelectric Transducers; Evaluation of the Transient Temperature Distribution of End-Face Sliding Friction Pair Using Infrared Thermometry; IEEE 1451-Based Sensor Interfacing and Data Fusion for Fire Smoke Detection

Valveless Micropump with Saw-Tooth Microchannel

Notes:

Description based upon print version of record.

Includes bibliographical references at the end of each chapters and indexes.

Description based on online resource; title from PDF title page (ebrary, viewed June 20, 2014).

ISBN:

3-03826-493-8