SIMOX / edited by Maria J. Anc.

Format:

Book

Contributor:

Anc, Maria J.

Institution of Electrical Engineers.

Series:

EMIS processing series ; no. 4.

Processing series ; no. 4

Language:

English

Subjects (All):

Semiconductors.

Silicon-on-insulator technology.

Physical Description:

1 online resource (161 p.)

Place of Publication:

London : Institution of Electrical Engineers, c2004.

Language Note:

English

System Details:

Access using campus network via VPN at home (THEi Users Only).

Summary:

SIMOX represents the first effort to compile a broad spectrum of knowledge from various groups of researchers and technologists in the world. It provides the reader with a basic understanding of SIMOX technology and in addition gives a good starting point for further investigation and applications.

Contents:

Contents; Editor; Authors; Abbreviations; 1. Introduction; 2. Overview of SIMOX technology: historical perspective; 3. Fundamental processes in SIMOX layer formation: ion implantation and oxide growth; 4. SIMOX/SOI processes: flexibility based on thermodynamic considerations; 5. Electrical and optical characterisation of SIMOX substrates; 6. SIMOX material technology from R&D to advanced products; Subject Index

Notes:

Description based upon print version of record.

Includes bibliographical references and index.

ISBN:

1-282-26332-3

9786612263323

1-84919-064-X

OCLC:

460736336