Laser cleaning : optical physics, applied physics, and materials science / editor, Boris Lukyanchuk.

Format:

Book

Conference/Event

Contributor:

Lukianchuk, B. S. (Boris Semenovich)

Conference Name:

International Workshop on Laser Cleaning (1st : 2001 : Singapore)

Language:

English

Subjects (All):

Lasers--Industrial applications--Congresses.

Lasers.

Materials science--Instruments--Congresses.

Materials science.

Physical Description:

1 online resource (482 p.)

Place of Publication:

River Edge, N.J. : World Scientific, c2002.

Language Note:

English

Summary:

Laser cleaning is very important for modern high technology. It is used, or considered for use in the fabrication of printed circuit boards, in the production of dynamic random access memory (DRAM), in lithography and epitaxial growth, for the removal of contaminations during via-hole production, and for the cleaning of micro-optical and micro-mechanical components.This invaluable book presents the mechanics of the cleaning processes, experimental results, and different applications, including laser cleaning of art. It contains review articles by leading specialists in laser cleaning who parti

Contents:

Contents; Preface; References; Part 1. History; Chapter 1. THE ROAD TO ""STEAM LASER CLEANING""; 1. Meeting Andrew C. Tam; 2. A cleaning method needed; 3. 'Laser cleaning'; 4. 'Steam laser cleaning'; 5. Steam laser cleaning with short-pulse IR-lasers; 6. Steam laser cleaning: direct imaging of the jet motion; 7. Opto-acoustic detection of the liquid film explosion; 8. Steam laser cleaning: study of the mechanism of the liquid film explosion; 9. Stencil masks again; Acknowledgement; References; Part 2. Dry Laser Cleaning; Chapter 2. DRY LASER CLEANING OF PARTICLES BY NANOSECOND PULSES: THEORY

1. Introduction2. Adhesion potential and equation of motion; 2.1. Model expression for VdW - elastic potential; 2.2. Parabolic approximation; 2.3. Equation for the evolution of deformation h; 2.4. Damping coefficient; 2.4.1. Knudsen viscosity; 2.4.2. Stokes viscosity; 2.4.3. Absorption of sound; 2.4.4. Emission of sound; 2.4.5. Plastic deformations; 3. Thermal expansion; 3.1. Hierarchy of scales; 3.2. General equations; 3.3. Unilateral quasi-static expansion; 3.4. 3D quasi-static expansion for finite beams with ID heat conduction; 3.4.1. Comparison between different approximations

3.5. Particle influence on the expansion of the substrate3.6. Unilateral dynamic expansion; 3.7. Thermal expansion of absorbing particle; 3.8. Transparent particle heated by the substrate; 3.9. Maximum velocity of ejected particles; 4. Cleaning threshold; 4.1. General threshold conditions; 4.1.1. Short cleaning pulse; 4.1.2. Long cleaning pulse; 4.1.3. Over-damped movement; 4.1.4. Long pulses with steep fronts; 4.2. Single sinusoidal pulse in parabolic potential without damping; 4.3. Dependence of cleaning threshold on particle radius and pulse duration

5. SiO2 particles cleaned from Si wafers5.1. Experimental; 5.2. Cleaning threshold vs. radius; 5.3. Role of small oscillations in intensity; 5.4. Suggestions for cleaning experiments; 6. Conclusions; Acknowledgements; Appendix A. Quasi-static 3D thermal expansion; Appendix B. Cleaning threshold with the single sinusoidal pulse; References; Chapter 3. OPTICAL RESONANCE AND NEAR-FIELD EFFECTS IN DRY LASER CLEANING; 1. Introduction; 2. Optical resonance and near-field effects within the Mie theory; 3. Particle on the surface. Beyond the Mie theory

4. Adhesion potential and Hamaker-Lifshitz constant5. Temperature under the particle; 6. Dynamics of the particle 3D effects; 7. Comparison with experimental results; 7.1. Local substrate ablation - a probe for optical near-fields; 7.1.1. Morphology of near field-induced damage sites; 7.1.2. Parameters influencing field enhancement induced ablation; 7.2. Near field effects in the laser cleaning process; 7.2.1. Experimental details; 7.2.2. Variation of the size parameter; 7.2.2.1. Variation of the particle size; 7.2.2.2. Variation of the laser wavelength; 7.2.3. Influence of incident angle

7.2.4. Influence of surface roughness

Notes:

Review papers of the participants of the First International Workshop on Laser Cleaning held in Singapore in 2001.

Includes bibliographical references and index.

ISBN:

9786611929718

9781281929716

1281929719

9789812777515

9812777512