Advances in multiphysics simulation and experimental testing of MEMS / editors Attilio Frangi ... [et al.].

Format:

Book

Contributor:

Frangi, Attilio.

Series:

Computational and experimental methods in structures ; v. 2.

Computational and experimental methods in structures ; v. 2

Language:

English

Subjects (All):

Microelectromechanical systems--Simulation methods.

Microelectromechanical systems.

Microelectromechanical systems--Testing.

Physical Description:

1 online resource (504 p.)

Place of Publication:

London : Imperial College Press ; Hackensack, N.J. : distributed by World Scientific Publishing, c2008.

Language Note:

English

Summary:

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.

Contents:

Contents; Preface; 1. Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices M. Gad-el-Hak; 1.1. Introduction; 1.2. Fluid Mechanics Issues; 1.3. Fluid Modeling; 1.4. Gas Flows; 1.5. Liquid Flows; 1.6. Molecular Dynamics Simulations; 1.7. A Typical MD Result; 1.8. Hybrid Methods; 1.9. Surface Phenomena; 1.10. Conclusions; References; 2. Using the Kinetic Equations for MEMS and NEMS C. Cercignani, A. Frezzotti and S. Lorenzani; 2.1. Introduction; 2.2. The Boltzmann Equation; 2.3. The Linearized Boltzmann Equation and the BGK Model; 2.4. The Macroscopic Balance Equations

2.5. Boundary Conditions2.6. The Modified Reynolds Equation; 2.7. The Reynolds Equation and the Poiseuille-Couette Problem; 2.8. The Generalized Reynolds Equation for Unequal Walls; 2.9. A Kinetic Approach for the Evaluation of Damping in MEMS; 2.10. Kinetic Theory Extension to Dense Fluids; 2.10.1. The Mathematical Model; 2.10.2. Fluid-Wall Interaction and Boundary Conditions; 2.11. Numerical Results; Acknowledgment; References; 3. Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices M. A. Gallis; 3.1. Introduction; 3.2. Basic Method; 3.2.1. Statistical Error

3.2.2. Discretization Error3.2.3. Number of Simulators per Cell; 3.2.4. Cell Size; 3.2.5. Time Step; 3.2.6. Comprehensive Study of Discretization Error; 3.3. Comparison to Chapman-Enskog Theory; 3.3.1. Theoretical Results; 3.3.2. Fourier and Couette Flow; 3.3.3. DSMC Results; 3.4. Comparison to Moment-Hierarchy Theory; 3.4.1. Theoretical Results; 3.4.2. Simulation Results; 3.5. Simulations of Microscale Flows; 3.5.1. Heat Transfer at Arbitrary Knudsen Numbers; 3.5.2. Heat Transfer in a Microgap; 3.5.3. Thermal Actuation; 3.5.4. Heat Transfer from a Microbeam to the Substrate

3.5.5. Gas Damping3.5.6. Gas Damping of a Cantilevered Microbeam; 3.5.7. Thermally Driven Flows; 3.6. Conclusions; Acknowledgments; References; 4. New Approaches for the Simulation of Micro-Fluidics in MEMS T. Y. Ng, H. Li, L. S. Pan, D. Xu and K. Y. Lam; 4.1. Introduction; 4.1.1. Micro-Fluidic Gas Flows- Introduction and Review; 4.1.2. Micro-Fluidic Liquid Flows - Introduction and Review; 4.2. Modeling and Simulation of Gaseous Micro-Flow; 4.2.1. The Molecular Block Direct Simulation Monte Carlo (MB-DSMC) Method; 4.2.1.1. Basic Model and Assumptions

4.2.1.2. A Discussion on the Macro Quantities4.2.1.3. Molecular Block DSMC Algorithm; 4.2.2. MB-DSMC Simulation Results for Gaseous Flows; 4.2.2.1. Decrease in Statistical Error; 4.2.2.2. Consistency of the Mean Free Path; 4.2.2.3. Consistency of the Dynamic Viscosity; 4.2.2.4. Validation of Temperature Field Simulation; 4.2.3. Conclusion; 4.3. Modeling and Simulation of Liquid Micro-Flow; 4.3.1. A Modified One-Equation Model for Micro-Scale Liquid Flow; 4.3.2. Simulation Results for Liquid Flow in Micro-Tubes; 4.3.3. Conclusions; References

5. Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers A. Frangi, W. Ye and J. White

Notes:

Description based upon print version of record.

Includes bibliographical references.

ISBN:

9781860948633

1860948634

OCLC:

843333354