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Fabrication of Micro/Nano Structures via Precision Machining : Modelling, Processing and Evaluation / edited by Guoqing Zhang, Bin Xu, Yanjun Lu, Suet To.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Manufactures.
- Production engineering.
- Machines, Tools, Processes.
- Mechanical Process Engineering.
- Local Subjects:
- Machines, Tools, Processes.
- Mechanical Process Engineering.
- Physical Description:
- 1 online resource (397 pages)
- Edition:
- 1st ed. 2023.
- Place of Publication:
- Singapore : Springer Nature Singapore : Imprint: Springer, 2023.
- Summary:
- This book introduces the cutting-edge technology of micro/nano structure fabrication from precision machining, electrical discharge machining (EDM) and precision grinding and injection molding, the contents of the presented book includes but not limited to the machining process, cutting tool preparation, tool path generation, and surface evaluation. This book provides a variety of feasible fabrication methods and advanced manufacturing techniques for the precision fabrication of micro/nano-structures, especially for complex micro/nano-structures. Since the book focuses on the micro/nano-structure fabrication methods including hieratical micro/nano-structures, graduate students, engineering technicians, and researchers in related areas will benefit from this book; also, someone in related application fields such as biomedicine, communication, optics may be the potential readers of this book.
- Contents:
- Chapter 1. Introduction, Yuting Ma, Shuaikang Cao and Guoqing Zhang
- Chapter 2. Tool offset flycutting straight-groove-type micro structures, Jianpeng Wang and Guoqing Zhang
- Chapter 3. Tool offset flycutting multi-layer hierarchical microstructures, Shuai Ma and Guoqing Zhang
- Chapter 4. Tool offset flycutting micro-optics arrays with high-aspect-ratio, Zhanwen Sun and Suet To
- Chapter 5. Diamond milling system for fabricating infrared micro-optics arrays, Zhanwen Sun and Sujuan Wang
- Chapter 6. Cutting force and energy modelling in ultra-precision machining of micro-structures, Zhejia Zhao, Zhanwen Sun and Suet To.
- Notes:
- Includes bibliographical references.
- Other Format:
- Print version: Zhang, Guoqing Fabrication of Micro/Nano Structures Via Precision Machining
- ISBN:
- 9789819913381
- OCLC:
- 1378392559
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