Microactuators, Microsensors and Micromechanisms : MAMM 2022 / edited by Ashok Kumar Pandey, Prem Pal, Nagahanumaiah, Lena Zentner.

Format:

Book

Contributor:

Pandey, Ashok Kumar, editor.

Series:

Mechanisms and Machine Science, 2211-0992 ; 126

Language:

English

Subjects (All):

Microtechnology.

Microelectromechanical systems.

Mechatronics.

Machinery.

Microsystems and MEMS.

Machinery and Machine Elements.

Local Subjects:

Microsystems and MEMS.

Mechatronics.

Machinery and Machine Elements.

Physical Description:

1 online resource (377 pages)

Edition:

1st ed. 2023.

Place of Publication:

Cham : Springer International Publishing : Imprint: Springer, 2023.

Summary:

This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized underthe patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Contents:

Intro

Scientific Advisory Committee

Organizing Committee

Preface

Contents

Free Vibration of Compliant Mechanisms Based on Euler-Bernoulli-Beams

1 Introduction

2 Analytical Method

2.1 Differential Equations of Motion

2.2 Boundary Conditions

2.3 Continuity Conditions

2.4 Matrix Form

2.5 Transfer Matrices

2.6 Equation of the Natural Frequencies

2.7 First Verification of the Analytical Approach

3 Design of the Calculation Tool

3.1 Programming Language Python

3.2 Design of the Graphical User Interface for the Calculation Tool

4 Validation and Verification

4.1 Test Specimen Design

4.2 Material Choice and Manufacturing

4.3 Free Vibration Testing

4.4 Dynamic Vibration Testing

4.5 Verification Through Finite Element Analysis

5 Results

6 Discussion

7 Conclusion and Outlook

8 Appendix

References

Towards Topology Optimization of Pressure-Driven Soft Robots

2 Pressure Load Modeling

3 Topology Optimization Formulation

4 Numerical Results and Discussions

5 Closure

Compliant Finger Gripper Based on Topology Optimization

2 Related Work

3 Motivation and Organization

4 Formulation of the Problem, Objective and Constraints

5 Contact Modeling in Large Deformation Between Beams and External Surfaces

6 Optimization - Hill Climbing Mutation Algorithm

7 Optimization Results and Discussion

7.1 Initial Model and Inputs of the Design

7.2 Results

7.3 Discussion

8 Conclusions

Development of a Database to Simulate and Adapt Compliant Mechanisms to a Given Characteristic for Improving Energy Efficiency of a Walking Robot

2 Desired Characteristic

3 Database Design

3.1 Mathematical Model

4 Validation

5 Choosing a Compliant Mechanism.

6 Discussion and Outlook

Analytical Characterization of Spatial Compliant Mechanisms Using Beam Theory

2 Analytical Model

2.1 Mathematical Description of the Deformation State

2.2 Solution Process

3 Verification and Application

4 Conclusions

Study of Curved Beam Based Displacement Amplifying Compliant Mechanism for Accelerometer Design

2 Accelerometer Designs

2.1 Conventional Accelerometer

2.2 Accelerometer Employing Compliant Mechanism

3 Optimization of DaCM

4 Accelerometer Using Compliant Mechanism

5 Results and Discussion

5.1 Modal Frequencies

5.2 Cross-Axis Sensitivity

5.3 Stress

5.4 Non-linearity

5.5 Capacitance

6 Analysis of Fabrication Induced Variations

7 Conclusion

Model of a Micromechanical Modal-Localized Accelerometer with an Initially Curvedmicrobeam as a Sensitive Element

2 Proposed Accelerometer Model

3 Mathematical Model

3.1 Static Equilibrium Equations

3.2 The Equation of Small Oscillations Around Static Equilibrium

4 Parameters of the Structure Under Consideration

5 Diagrams of Static Equilibrium

6 Analysis of Small Oscillations Around Equilibrium Position

6.1 Finite-Element Modeling

6.2 Dependence of Natural Frequencies on the Parameters of Static Voltage and Axial Force

7 Conclusions

Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer

2 DaCM in MEMS Accelerometer

3 Analytical and Numerical Study

4 Results and Discussion

4.1 Influence of p on the Characteristics of DaCM

4.2 Variation in Keq and Meq Due to Folded Beam Configuration

4.3 Characteristics of MEMS Accelerometer Combined with DaCM

5 Conclusion

References.

Design and Analysis of the Two-Level Accelerometer

2 Design

3 Analysis and Discussions

4 Conclusion

Microchannel Induced Tailoring of Bandwidth of Push-Pull Capacitive MEMS Accelerometer

2 Device Structure

3 Results and Discussions

A Comparison of Ring and Disk Resonator Gyroscopes Based on Their Degenerate Eigenmode Shapes

2 Methodology

Parametric Tuning of Natural Frequencies of Tuning Fork Gyroscope

2 Dual Mass Tuning Fork Gyroscope

2.1 Dual Mass TFG with Spring Coupling

3 Conclusions

Design and Analysis of Single Drive Tri-Axis MEMS Gyroscope

2 Analytical Studies

2.1 Drive Mode

2.2 Roll and Pitch Modes

2.3 Yaw Mode

3 Numerical Studies

Analysis of the Equilibrium of a Magnetic Contactless Suspension

2 Mathematical Model

3 Equilibrium

4 Magnetic Spring Constant of the Suspension

Frequency Analysis of Microbeam with Axial Pretension Using MSGT

2 Mathematical Formulation

2.1 Modified Strain Gradient Theory

2.2 Surface Elasticity

2.3 Governing Equation of Motion

3 Solution Procedure

3.1 Analytical Solution

3.2 Differential Quadrature Method (DQM)

4.1 Strain Gradient Effects

4.2 Strain Gradient with Surface Elasticity

5 Conclusions

Nonlocal Nonlinear Analysis of Functionally Graded Nano Plates Used in MEMs Devices

2 Eringens Nonlocal Model

3 Equivalent Properties of Functionally Graded Materials

4 Governing Equations

5 Numerical Examples

6 Conclusions.

References

Finite Element Analysis of Squeezed Film Damping on Trapezoidal Microcantilever Resonators at Different Pressure Levels

2 Squeezed Film Damping

3 FEM Analysis

3.1 Verification of FEM Model

4 Results and Discussions

Two-Dimensional Hydrodynamic Forces in an Array of Shape-Morphed Cantilever Beams

2 Governing Equations

2.1 Transverse Velocity of a Shape-Morphed Cantilevers

2.2 Non-dimensionalization and Numerical Procedure

3.1 Hydrodynamic Force

3.2 Hydrodynamic Coefficient

Design and Performance Analysis of TiOx Based MEMS Bolometer Pixel

2 Proposed Device Structure

FEM Analysis of Split Electrode IDTs Designed Lithium Tantalate-Polyaniline SAW Gas Sensor

2 Model Design

3 Simulation Methodology

Thermal Study of Thin-Film Heater for PCR Reaction-Based Applications

2 Thin Film Heater Design

2.1 Serpentine Geometry of Heater

2.2 Structure Optimization of the Serpentine Heater

3 Fabrication of Thin Film Heater

4 Thermal Study of Thin Film Heater

Etching Characteristics of Si{110} in NaOH Based Solution

2 Experimental Details

3 Results

Effect of IPA on Micromachining Characteristics of Silicon in KOH-Based Solution

3 Results and Discussion

3.1 Etch Rate

3.2 Etched Surface Roughness and Morphology

3.3 Undercutting

Deep Grooves in Borofloat Glass by Wet Bulk Micromachining

1 Introduction.

2 Experimental Details

Micro-piezo Actuator for Cell Lysis

2.1 Sample Preparation

2.2 IDT Fabrication

2.3 PDMS Microchannel Fabrication

2.4 Device Setup and Operation

Wax-Printed Microfluidic Paper Analytical Device for Viscosity-Based Biosensing in a 3D Printed Image Analysis Platform

2 Materials and Methods

2.1 Materials

2.2 Fabrication of the Microfluidic Wax-based Paper-based Analytical Device (μ-PAD)

3 Experimentation

3.1 Integrated Image Processing Platform with Raspberry Pie Module and µPAD

3.2 Estimation of Viscosity

4 Result and Discussion

4.1 Denaturation of BSA

4.2 Denaturation of Lysozymes

Detection of Volatile Organic Compounds Using Solution Processed Organic Field-Effect Transistors

2.1 Model and Simulation Methodolgy

3.1 Modelling of Vapour Interactions with the Organic Semiconductor

Thickness Dependent Chlorpyrifos Sensing Behavior of Silver Doped ZnO Nanowires

2 Experimental Work

Investigation of AuCl3 Doped MoS2 Based IR Detector with the Variation of Annealing Temperature

Investigation of Structural and Electrical Properties of Ta2O5 Thin Films with Sputtering Parameters for Microelectronic Applications

Optimization of Controllable Pulsed LASER Deposition Parameters for the Fabrication of Lead Free Ba(Zr0.15Ti0.85)O3 Thin Films.

Notes:

Includes bibliographical references.

Other Format:

Print version: Pandey, Ashok Kumar Microactuators, Microsensors and Micromechanisms

ISBN:

3-031-20353-4

OCLC:

1351751879