Laser-based nano fabrication and nano lithography / edited by Koji Sugioka, Ya Cheng.

Format:

Book

Contributor:

Sugioka, Koji, editor.

Cheng, Ya, editor.

Language:

English

Subjects (All):

Microfabrication.

Physical Description:

1 online resource (154 pages)

Place of Publication:

Basel, Switzerland : MDPI, 2018.

Summary:

The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, much effort has been made to overcome the diffraction limit in nano fabrication. Specifically, combinations of multiphoton absorption by ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit. The use of the optical near-field achieves nano ablation with feature sizes below 100 nm. Multiple pulse irradiation from the linearly polarized ultrafast laser produces periodic nanostructures with a spatial period much smaller than the wavelength. Unlimited diffraction resolutions can also be achieved with shaped laser beams. In the meanwhile, lasers are also widely used for the synthesis of nano materials including fullerenes and nano particles. In view of the rapid advancement of this field in recent years, this Special Issue aims to introduce the state-of-the-art in nano fabrication and nano lithography, based on laser technologies, by leading groups in the field.

Contents:

About the Special Issue Editors

Preface to "Laser-Based Nano Fabrication and Nano Lithography"

Seiya Nikaido, Takumi Natori, Ryo Saito and Godai Miyaji Nanostructure Formation on Diamond-Like Carbon Films Induced with Few-Cycle Pulses at Low Fluence from a Ti:Sapphire Laser Oscillator Reprinted from: Nanomaterials 2018, 8, 535, doi:10.3390/nano8070535

Xin Zheng, Cong Cong, Yuhao Lei, Jianjun Yang and Chunlei Guo Formation of Slantwise Surface Ripples by Femtosecond Laser Irradiation Reprinted from: Nanomaterials 2018, 8, 458, doi:10.3390/nano8070458

Ignacio Falcón Casas and Wolfgang Kautek Subwavelength Nanostructuring of Gold Films by Apertureless Scanning Probe Lithography Assisted by a Femtosecond Fiber Laser Oscillator Reprinted from: Nanomaterials 2018, 8, 536, doi:10.3390/nano8070536

Ying Liu, John H. Campbell, Ori Stein, Lijia Jiang, Jared Hund and Yongfeng Lu Deformation Behavior of Foam Laser Targets Fabricated by Two-Photon Polymerization Reprinted from: Nanomaterials 2018, 8, 498, doi:10.3390/nano8070498

Florin Jipa, Stefana Iosub, Bogdan Calin, Emanuel Axente, Felix Sima and Koji Sugioka High Repetition Rate UV versus VIS Picosecond Laser Fabrication of 3D Microfluidic Channels Embedded in Photosensitive Glass Reprinted from: Nanomaterials 2018, 8, 583, doi:10.3390/nano8080583

Yasutaka Nakajima, Shuichiro Hayashi, Akito Katayama, Nikolay Nedyalkov and Mitsuhiro Terakawa Femtosecond Laser-Based Modification of PDMS to Electrically Conductive Silicon Carbide Reprinted from: Nanomaterials 2018, 8, 558, doi:10.3390/nano8070558

Eugene G. Gamaly, Saulius Juodkazis, Andrei V. Rode Extreme Energy Density Confined Inside a Transparent Crystal: Status and Perspectives of Solid-Plasma-Solid Transformations Reprinted from: Nanomaterials 2018, 8, 555, doi:10.3390/nano8070555

Xiao-Wen Cao, Qi-Dai Chen, Hua Fan, Lei Zhang, Saulius Juodkazis and Hong-Bo Sun Liquid-Assisted Femtosecond Laser Precision-Machining of Silica Reprinted from: Nanomaterials 2018, 8, 287, doi:10.3390/nano8050287

Dongshi Zhang, Wonsuk Choi, Jurij Jakobi, Mark-Robert Kalus, Stephan Barcikowski, Sung-Hak Cho and Koji Sugioka Spontaneous Shape Alteration and Size Separation of Surfactant-Free Silver Particles Synthesized by Laser Ablation in Acetone during Long-Period Storage Reprinted from: Nanomaterials 2018, 8, 529, doi:10.3390/nano8070529

Dongshi Zhang, Wonsuk Choi, Yugo Oshima, Ulf Wiedwald, Sung-Hak Cho, Hsiu-Pen Lin, Yaw Kuen Li, Yoshihiro Ito and Koji Sugioka Magnetic Fe@FeO., Fe@C and a-Fe2O3 Single-Crystal Nanoblends Synthesized by Femtosecond Laser Ablation of Fe in Acetone Reprinted from: Nanomaterials 2018, 8, 631, doi:10.3390/nano8080631

Yoshiki Nakata, Keiichi Murakawa, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji and Yasuyuki Tsuboi Local Melting of Gold Thin Films by Femtosecond Laser-Interference Processing to Generate Nanoparticles on a Source Target Reprinted from: Nanomaterials 2018, 8, 477, doi:10.3390/nano8070477

Hsin-hui Huang, Takeshi Nagashima, Wei-hung Hsu, Saulius Juodkazis and Koji Hatanaka Dual THz Wave and X-ray Generation from a Water Film under Femtosecond Laser Excitation Reprinted from: Nanomaterials 2018, 8, 523, doi:10.3390/nano8070523.

Notes:

CC BY-NC-ND

Description based on publisher supplied metadata and other sources.

ISBN:

9783038974116

3038974110

OCLC:

1154161337

Publisher Number:

10.3390/books978-3-03897-411-6