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Semiconductor microchips and fabrication : a practical guide to theory and manufacturing / Yaguang Lian.
- Format:
- Book
- Author/Creator:
- Lian, Yaguang, author.
- Language:
- English
- Subjects (All):
- Integrated circuits--Design and construction.
- Integrated circuits.
- Semiconductors--Design and construction.
- Semiconductors.
- Physical Description:
- 1 online resource (xiv, 306 pages) : illustrations (some color)
- Place of Publication:
- Hoboken, New Jersey : Wiley-IEEE Press, [2023]
- Contents:
- Front Matter
- Introduction to the Basic Concepts
- Brief Introduction of Theories
- Early Radio Communication
- Basic Knowledge of Electric Circuits (Circuits)
- Further Discussion of Semiconductors and Diodes
- Transistor and Integrated Circuit
- The Development History of Semiconductor Industry
- Semiconductor Photonic Devices
- Semiconductor Light Detection and Photocell
- Manufacture of Silicon Wafer
- Basic Knowledges of Process
- Photolithography (Lithography)
- Dielectric Films Growth
- Introduction of Etching and RIE System
- Dry Etching
- Metal Processes
- Doping Processes
- Process Control Monitor, Packaging, and the Others
- Index
- Notes:
- Includes bibliographical references and index.
- Electronic reproduction. Hoboken, N.J. Available via World Wide Web.
- Description based on online resource; title from digital title page (viewed on October 19, 2022).
- Other Format:
- Print version: Lian, Yaguang. Semiconductor microchips and fabrication
- ISBN:
- 9781119867814
- 1119867800
- 9781119867791
- 1119867797
- 1119867819
- 9781119867807
- Publisher Number:
- 99993416334
- Access Restriction:
- Restricted for use by site license.
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