2022 International Symposium on Semiconductor Manufacturing (ISSM) / Institute of Electrical and Electronics Engineers.

Format:

Book

Author/Creator:

Institute of Electrical and Electronics Engineers, author, issuing body.

Language:

English

Subjects (All):

Semiconductors--Congresses.

Semiconductors.

Physical Description:

1 online resource

Other Title:

2022 International Symposium on Semiconductor Manufacturing

Place of Publication:

Piscataway, New Jersey : IEEE, 2022.

Summary:

ISSM is an annual conference of semiconductor manufacturing professionals dedicated to sharing technical solutions and opinions on the advancement of manufacturing science, technologies, and management disciplines ISSM aims to establish new concepts for semiconductor manufacturing technologies and to promote them as systemized and universalized technologies ISSM s role has been to challenge the concept of shifting from know how to science in semiconductor manufacturing technologies ISSM covers the areas of interest including factory design & material handling, manufacturing strategy and operation management, manufacturing control and execution, environment safety and health, process integration, process and material optimization, yield enhancement methodology, contamination control and ultraclean technology, process control and monitoring, process and metrology equipment, DFM, and final manufacturing.

Notes:

Description based on online resource; title from PDF title page (IEEE, viewed April 26, 2023).

ISBN:

1-66547-133-6