Ultrashort pulse laser ablation of bulk materials using shaped laser beams / Dmitriy Mikhaylov.

Format:

Book

Author/Creator:

Mikhaylov, Dmitriy, author.

Language:

English

Subjects (All):

Laser pulses, Ultrashort.

Physical Description:

1 online resource (177 pages)

Edition:

1. Auflage.

Place of Publication:

Göttingen : Cuvillier Verlag, [2021]

Summary:

High precision, high quality, and high throughput of ultrashort pulse laser ablation of bulk material are the most demanded properties that are required to let this process technology compete with other micro-machining techniques. Previous attempts to increase volumetric ablation rates of ultrashort pulse laser processes were based on the increase of fluence or pulse repetition rates. They run into limitations mainly set by the occurrence of bumpy surfaces due to overheating of bulk material. In this work, the potential of laser beam shaping for the enhancement of ablation rates is studied systematically for the first time. The question regarding the physically shortest possible process time for ablation of 2.5D-structures by means of an ultrashort pulse laser is answered using a heat conduction model, which is extended by the ability to consider spatially shaped beams. The strategy of laser beam stamping is implemented in a novel optical setup and proven both theoretically and experimentally to have a great potential for increasing ablation rates.

Contents:

Intro

1 Introduction

2 Theoretical principles and state of the art

2.1 Ultrashort pulse laser technology for materialprocessing

2.2 Laser beam shaping

2.3 Liquid crystal on silicon spatial light modulators

2.4 Phase retrieval algorithms

3 Materials and methods

3.1 Processed materials

3.2 System components

3.3 Characterization methods

4 Theoretical calculation of limits for theincrease of volumetric ablation rate

4.1 Heat accumulation modeling for spatially shapedbeams

4.2 Ideal requirements on laser sources as well as beamshaping and guiding optics

5 Development of an advanced programmablebeam shaping optics

5.1 Concept development for uniform beam shaping

5.2 Extension of the standard beam splitting algorithm

5.3 Development of the double spatial light modulatorsetup

5.4 Summary and outlook of the conducted opticsdevelopment

6 Process development using flexible beamshaping

6.1 Scanning ablation strategy

6.2 Stamping ablation strategy

6.3 Calculation scheme for the prediction of ablationrates

7 Summary and outlook

Bibliography

List of author's publications

Acknowledgements.

Notes:

Description based on print version record.

Includes bibliographical references.

ISBN:

9783736964464

3736964463

OCLC:

1259590253