1 option
Advanced Lithography 2021 : Exhibitor Product Demos / Society of Photographic Instrumentation Engineers.
- Format:
- Book
- Author/Creator:
- Society of Photographic Instrumentation Engineers,. author, issuing body.
- Series:
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 11669.
- Proceedings of SPIE--the International Society for Optical Engineering ; Volume 11669
- Language:
- English
- Subjects (All):
- Condensed matter--Congresses.
- Condensed matter.
- Physical Description:
- 1 online resource.
- Other Title:
- Advanced Lithography 2021
- Place of Publication:
- Bellingham, Washington : SPIE, 2021.
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 1-5106-5583-2
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.