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ISSM : 2018 International Symposium on Semiconductor Manufacturing : proceedings of technical papers : December 10-11, 2018, KFC Hall, Tokyo, Japan / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Conference/Event
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author.
- Conference Name:
- International Symposium on Semiconductor Manufacturing (2018 : Tokyo, Japan)
- Language:
- English
- Subjects (All):
- Production engineering--Data processing--Congresses.
- Production engineering.
- Computer integrated manufacturing systems--Congresses.
- Computer integrated manufacturing systems.
- Engineering design--Congresses.
- Engineering design.
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Manufacturing processes--Data processing--Congresses.
- Manufacturing processes.
- Physical Description:
- 1 online resource (159 pages)
- Place of Publication:
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2018.
- Notes:
- Description based on: online resource; title from pdf title page (IEEE Xplore, viewed May 11, 2020).
- Includes index.
- ISBN:
- 1-5386-6268-X
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