1 option
ASMC : 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference : 30 April-3 May 2018, Saratoga Springs, NY, USA / Institute of Electrical and Electronics Engineers.
IEEE Xplore (IEEE/IET Electronic Library - IEL) Available online
IEEE Xplore (IEEE/IET Electronic Library - IEL)- Format:
- Book
- Conference/Event
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author.
- Conference Name:
- Annual SEMI Advanced Semiconductor Manufacturing Conference (29th : 2018 : Saratoga Springs, N.Y.)
- Language:
- English
- Subjects (All):
- Semiconductors--Design and construction--Congresses.
- Semiconductors.
- Process control--Congresses.
- Process control.
- Physical Description:
- 1 online resource (394 pages)
- Place of Publication:
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2018.
- Notes:
- Description based on: online resource; title from title screen (IEEE Xplore, viewed April 3, 2020).
- ISBN:
- 1-5386-3748-0
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.