1 option
2018 31st International Vacuum Nanoelectronics Conference : 9-13 July 2018, Kyoto, Japan / American Vacuum Society.
- Format:
- Book
- Conference/Event
- Conference Name:
- International Vacuum Nanoelectronics Conference (31st : 2018 : Kyoto, Japan)
- Language:
- English
- Subjects (All):
- Vacuum technology--Congresses.
- Vacuum technology.
- Microelectronics--Congresses.
- Microelectronics.
- Physical Description:
- 1 online resource (148 pages)
- Place of Publication:
- Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, 2018.
- Notes:
- Description based on: online resource; title from pdf title page (IEEE Xplore, viewed April 3, 2020).
- ISBN:
- 1-5386-5717-1
The Penn Libraries is committed to describing library materials using current, accurate, and responsible language. If you discover outdated or inaccurate language, please fill out this feedback form to report it and suggest alternative language.