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Handbook of Optical Metrology : principles and applications / Toru Yoshizawa.
- Format:
- Book
- Author/Creator:
- Toru, Yoshizawa, 1939- author.
- Language:
- English
- Subjects (All):
- Optical measurements.
- Metrology.
- Physical Description:
- 1 online resource (xiii, 905 pages) : illustrations
- Edition:
- Second Edition.
- Other Title:
- Handbook of Optical Metrology
- Place of Publication:
- Boca Raton : CRC Press, 2017.
- Summary:
- This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters--nearly 100 pages--on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
- Notes:
- Includes bibliographical references.
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 9781315215952
- 1315215950
- 9781138893634
- 1138893633
- 9781138112087
- 1138112089
- 9781351831840
- 1351831844
- OCLC:
- 909802625
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