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Passive Silicon Photonic Devices : Design, Fabrication, and Testing / Yikai Su; Yong Zhang
- Format:
- Book
- Author/Creator:
- Su, Yikai
- Language:
- English
- Physical Description:
- online resource (188 pages)
- Place of Publication:
- Melville, New York : AIP Publishing, 2022
- Summary:
- This important book is a practical guide to the design, fabrication, and testing of passive silicon photonic devices. It outlines the progress of the last decades and is organized into three parts: design principles of silicon waveguides and devices, nano-fabrication processes for passive devices, and testing of waveguide devices including vertical coupling and edge coupling setup for interfacing with fibers. This timely book: -- Provides detailed materials on the operation of equipment and methods for fabrication and testing -- Teaches researchers and technical staff the skills to implement silicon photonic circuits quickly and successfully -- Is authored by an eminent team from Shanghai Jiao Tong University, School of Electronic Information and Electrical Engineering, Shanghai, China Researchers, specialists, and students working in photonics and silicon photonics devices will find Passive Silicon Photonic Devices: Design, Fabrication, and Testing an invaluable resource.
- Contents:
- History and Current Status - Silicon-Family Materials and Waveguides - Design of Passive Silicon Photonic Devices - Nano-Fabrication Process - Equipment and Materials in Cleanroom - Testing of Passive Devices - Photonic Integrated Circuits - Perspective on Passive Silicon Photonic Devices.
- Other Format:
- Printed edition
- ISBN:
- 9780735424289
- 9780735424296
- 9780735424302
- Access Restriction:
- Restricted for use by site license.
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