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Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII / Jie Qiao, editor.
- Format:
- Book
- Language:
- English
- Subjects (All):
- Microelectronics.
- Physical Description:
- 1 online resource
- Other Title:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing
- Place of Publication:
- [Place of publication not identified] : SPIE, 2022.
- Notes:
- Description based on: online resource; title from PDF information screen (Worldcat, viewed May 4, 2023).
- ISBN:
- 1-5106-4848-8
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