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Optical lithography : here is why / Burn J. Lin.
- Format:
- Book
- Author/Creator:
- Lin, Burn J., author.
- Series:
- SPIE digital library
- SPIE monograph ; PM329
- SPIE Press monograph ; PM329
- Language:
- English
- Subjects (All):
- Microlithography.
- Semiconductors--Etching.
- Semiconductors.
- Lasers--Industrial applications.
- Lasers.
- Genre:
- Electronic books.
- Physical Description:
- 1 online resource (xvii, 580 pages) : illustrations.
- Edition:
- Second edition
- Place of Publication:
- Bellingham, Washington : SPIE, 2021.
- System Details:
- Mode of access: World Wide Web.
- Summary:
- "This book is written for new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get an overview of the outlook of optical lithography and means to enhance semiconductor manufacturing. This second edition blends the author's unique experience in research, teaching, and world-class high-volume manufacturing to add brand new material on proximity printing, as well as updated and expanded material on exposure systems, image formation, E-D methodology, hardware components, processing and optimization, and EUV and immersion lithographies."-- Provided by publisher.
- Contents:
- Preface
- 1 Introduction
- 2 Proximity Printing
- 3 Exposure Systems
- 4 Image Formation
- 5 The Metrics of Lithography: Exposure-Defocus (E-D) Tools
- 6 Hardware Components in Optical Lithography
- 7 Processing and Optimization
- 8 Immersion Lithography
- 9 EUV Lithography
- Appendix A: Methods to Evaluate the Region of Validity Based on Lithography Applications
- References
- Index
- Notes:
- Includes bibliographical references and index.
- Title from PDF title page (SPIE eBooks Website, viewed 2022-01-11)
- Other Format:
- Print version:
- ISBN:
- 9781510639966
- OCLC:
- 1291724633
- Access Restriction:
- Restricted for use by site license.
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