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Updates in Advanced Lithography

MLA

Hosaka, Sumio. Updates in Advanced Lithography. IntechOpen 2013[Place of publication not identified] : IntechOpen, 2013.

APA

Hosaka, S. (2013). Updates in Advanced Lithography. IntechOpen[Place of publication not identified] : IntechOpen.

Chicago

Hosaka, Sumio. Updates in Advanced Lithography. Edited by Sumio Hosaka. IntechOpen 2013[Place of publication not identified] : IntechOpen, 2013.

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