Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna.

Format:

Book

Author/Creator:

Eranna, G., author.

Language:

English

Subjects (All):

Silicon crystals--Electric properties.

Silicon crystals.

Physical Description:

1 online resource (414 p.)

Edition:

1st ed.

Place of Publication:

Boca Raton, FL : CRC Press : Taylor & Francis Group, 2015.

Language Note:

English

Summary:

Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges.Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the compl

Contents:

Front Cover; Dedication; Contents; Preface; About the Author; Chapter 1 Introduction; Chapter 2 Silicon: The Key Material for Integrated Circuit Fabrication Technology; Chapter 3 Importance of Single Crystals for Integrated Circuit Fabrication; Chapter 4 Different Techniques for Growing Single-Crystal Silicon; Chapter 5 From Silicon Ingots to Silicon Wafers; Chapter 6 Evaluation of Silicon Wafers; Chapter 7 Resistivity and Impurity Concentration Mapping of Silicon Wafers; Chapter 8 Impurities in Silicon Wafers; Chapter 9 Defects in Silicon Wafers

Chapter 10 Silicon Wafer Preparation for VLSI and ULSI ProcessingChapter 11 Packing of Silicon Wafers; Back Cover

Notes:

A Chapman and Hall book.

Includes bibliographical references at the end of each chapters.

Description based on online resource; title from PDF title page (ebrary, viewed December 11, 2014).

ISBN:

1-04-005585-0

0-429-06839-5

1-138-03419-3

1-4822-3282-0

9780429068393

OCLC:

897882998