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Journal of micro/nanopatterning, materials, and metrology.
- Format:
- Journal/Periodical
- Language:
- English
- Subjects (All):
- Microelectronics--Periodicals.
- Microelectronics.
- Microfabrication--Periodicals.
- Microfabrication.
- Nanostructured materials--Periodicals.
- Nanostructured materials.
- Semiconductor industry--Periodicals.
- Semiconductor industry.
- Physical Description:
- 1 online resource
- Quarterly
- Began with vol. 20, no. 1 (January 2021)
- Place of Publication:
- [Bellingham, WA] : SPIE-The International Society of Optical Engineering, 2021-
- Notes:
- Description based on vol. 20, no. 1 (January 2021); title from table of contents page (viewed on April 30, 2021)
- Latest issue consulted: vol. 20, no. 2 (April 2021)
- Refereed/Peer-reviewed
- ISSN:
- 2708-8340
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