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2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) / Institute of Electrical and Electronics Engineers.
- Format:
- Book
- Author/Creator:
- Institute of Electrical and Electronics Engineers, author, issuing body.
- Language:
- English
- Subjects (All):
- Microelectromechanical systems--Congresses.
- Microelectromechanical systems.
- Physical Description:
- 1 online resource
- Other Title:
- 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design
- Place of Publication:
- Piscataway, NJ : IEEE, 2020.
- Notes:
- Description based on publisher supplied metadata and other sources.
- ISBN:
- 9781728171807
- 1728171806
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