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Characterisation and Control of Defects in Semiconductors / Filip Tuomisto [Ed].
- Format:
- Book
- Series:
- Materials, Circuits & Devices.
- Materials, Circuits & Devices
- Language:
- English
- Subjects (All):
- Ion implantation.
- Magnetic resonance.
- Semiconductor doping.
- Semiconductors--Materials.
- Semiconductors.
- Silicon.
- Physical Description:
- 1 online resource (596 pages).
- Place of Publication:
- Stevenage : IET, 2019.
- System Details:
- text file
- Summary:
- The following topics are dealt with: semiconductor defect control; semiconductor doping; ion beam effects; ion implantation; elemental semiconductors; silicon; electrically active defects; point defect luminescence; vibrational spectroscopy; magnetic resonance methods; muons; positron annihilation spectroscopy; first principles methods; microscopy; 3D atomic-scale studies; ion beam modification; and ion beam analysis and channelling.
- ISBN:
- 9781785616563
- Access Restriction:
- Restricted for use by site license.
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