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MEMS Resonator Filters / Rajendra M Patrikar [Ed].
- Format:
- Book
- Series:
- Materials, Circuits & Devices.
- Materials, Circuits & Devices
- Language:
- English
- Subjects (All):
- Acoustic surface wave devices.
- Chip scale packaging.
- Finite element method.
- Integrated circuits.
- Integrated circuits--Design and construction.
- Integrated circuits--Reliability.
- Integrated circuits--Testing.
- Mathematical models.
- Microfabrication.
- Radio frequency integrated circuits.
- Physical Description:
- 1 online resource (432 pages).
- Place of Publication:
- Stevenage : IET, 2020.
- System Details:
- text file
- Summary:
- This book has 11 chapters dealing with Filter design; Microelectromechanical resonators design: low-frequency resonators; Microelectromechanical resonator design for high frequency; Finite-element modeling of RF MEMS resonators; Fabrication of low-frequency resonators; Fabrication of high-frequency resonators; Filter and oscillator design using SAW/BAW resonators; Testing and verification of MEMS resonator filters; 3D packaging for the integration of heterogeneous systems; and Reliability issues of MEMS resonators.
- ISBN:
- 9781785618970
- Access Restriction:
- Restricted for use by site license.
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