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Measurement assurance for dimensional measurements on integrated-circuit photomasks / Carroll. Croarkin.
- Format:
- Book
- Government document
- Author/Creator:
- Croarkin, Carroll, author.
- Series:
- NBS technical note ; 1164.
- NBS technical note ; 1164
- Language:
- English
- Subjects (All):
- Integrated circuits--Masks--Measurement.
- Integrated circuits.
- Optical instruments--Calibration.
- Optical instruments.
- Integrated circuits--Masks.
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1982.
- System Details:
- text file
- Notes:
- 1982.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 929066437
- Publisher Number:
- GOVPUB-C13-e093ca83ebd4bb2b49291a9a091832f6
- Access Restriction:
- Open Access Unrestricted online access
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