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Shape-sensitive linewidth measurements of resist structures : LITG410I project / John S. Villarrubia; Andras E. Vladar; Michael T. Postek.
- Format:
- Book
- Government document
- Author/Creator:
- Villarrubia, John S, author.
- Series:
- NISTIR ; 7089.
- NISTIR ; 7089
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2004.
- System Details:
- text file
- Notes:
- 2004.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 947047598
- Publisher Number:
- GOVPUB-C13-132e0b33b0302e17741fe47dbe4eebc8
- Access Restriction:
- Open Access Unrestricted online access
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