1 option
Semiconductor Microelectronics and Nanoelectronics Programs / Joaquin V. Martinez de Pinillos; Yaw S. Obeng; Michele L. Buckley.
National Institute of Standards and Technology (NIST) Publications Available online
National Institute of Standards and Technology (NIST) Publications- Format:
- Book
- Government document
- Author/Creator:
- Pinillos, Joaquin V. Martinez de, author.
- Series:
- NISTIR ; 7686.
- NISTIR ; 7686
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2010.
- System Details:
- text file
- Notes:
- 2010.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page (viewed December 31, 2015).
- Includes bibliographical references.
- OCLC:
- 951906941
- Publisher Number:
- GOVPUB-C13-76354b8e2bd3e8d154a89465746312b2
- Access Restriction:
- Open Access Unrestricted online access
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