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Semiconductor microelectronics and nanoelectronics programs / Stephen Knight; Joaquin V. Martinez de Pinillos; Yaw S. Obeng; Michele Buckley.

Format:
Book
Government document
Author/Creator:
Knight, Stephen, author.
Contributor:
Buckley, Michele.
Pinillos, Joaquin V. Martinez de.
Knight, Stephen.
Obeng, Yaw S.
National Institute of Standards and Technology (U.S.)
Series:
NISTIR ; 7513.
NISTIR ; 7513
Language:
English
Genre:
Technical reports.
Physical Description:
1 online resource.
Place of Publication:
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2008.
System Details:
text file
Notes:
2008.
Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
Title from PDF title page.
Includes bibliographical references.
OCLC:
947049555
Publisher Number:
GOVPUB-C13-44e8840a54cd70c03a35afa4a9612ad9
Access Restriction:
Open Access Unrestricted online access

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