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Nanomanufacturing of atom-based dimensional standards : a final project report of the national advanced manufacturing testbed / T.V. Vorburger; R.H. Allen; B. Damazo; J. Fu; D. Monk; M. Osti; J. Pellegrino; R. Rhorer; R. Russell; R. Silver; R. Sriram; K. Stouffer; D. A. Swyt; E. C. Teague; T. Wheatley; D. Wilmering.
- Format:
- Book
- Government document
- Author/Creator:
- Vorburger, T. V. (Theodore V.), author.
- Series:
- NISTIR ; 6850.
- NISTIR ; 6850
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2002.
- System Details:
- text file
- Notes:
- 2002.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 958933663
- Publisher Number:
- GOVPUB-C13-ca35345bfea3d3aec3f3924a80a0e934
- Access Restriction:
- Open Access Unrestricted online access
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