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RADC/NBS workshop moisture measurement and control for semiconductor devices, III : proceedings of the RADC/ NBS workshop held at the National Bureau of Standards Gaithersburg, MD November 2-4, 1983 / Benjamin A. Moore; Stanley Ruthberg.
- Format:
- Book
- Government document
- Author/Creator:
- Moore, Benjamin A., author.
- Series:
- NBSIR ; 84-2852.
- NBSIR ; 84-2852
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1984.
- System Details:
- text file
- Notes:
- 1984.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 947843819
- Publisher Number:
- GOVPUB-C13-581e46f683ff51691c924891b61e54d4
- Access Restriction:
- Open Access Unrestricted online access
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