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Methods of measurement for semiconductor materials, process control, and devices : quarterly report January 1 to March 31, 1971 / W. Murray Bullis.
- Format:
- Book
- Government document
- Author/Creator:
- Bullis, W. Murray, 1930- author.
- Series:
- NBS technical note ; 598.
- NBS technical note ; 598
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1971.
- System Details:
- text file
- Notes:
- 1971.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 936670892
- Publisher Number:
- GOVPUB-C13-5511943c6a8ae3a086b009b2864e60aa
- Access Restriction:
- Open Access Unrestricted online access
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