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A Framework for standard modular simulation : application to semiconductor wafer fabrication / Heshan Li [and others].
- Format:
- Book
- Government document
- Series:
- NISTIR ; 7236.
- NISTIR ; 7236
- Language:
- English
- Subjects (All):
- Semiconductor wafers--Standards.
- Semiconductor wafers.
- Physical Description:
- 1 online resource (17 pages) : illustrations.
- Place of Publication:
- [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2005].
- System Details:
- text file
- Notes:
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from page 1, viewed April 6, 2007.
- Includes bibliographical references.
- OCLC:
- 124075057
- Publisher Number:
- GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
- Access Restriction:
- Open Access Unrestricted online access
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