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Workshop summary report : scanning probe nanolithography workshop / John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano.
- Format:
- Book
- Government document
- Series:
- NISTIR ; 7040.
- NISTIR ; 7040
- Language:
- English
- Subjects (All):
- Nanoelectronics.
- Physical Description:
- 1 online resource (86 pages) : illustrations.
- Place of Publication:
- [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003].
- System Details:
- text file
- Notes:
- "January 2003."
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from page [1], viewed April 6, 2007.
- Includes bibliographical references.
- OCLC:
- 124074935
- Publisher Number:
- GOVPUB-C13-2a595f0c484316cf83fd83c867fe2926
- Access Restriction:
- Open Access Unrestricted online access
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