Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.

Format:

Book

Government document

Contributor:

Crowley, Chris J.

Johnson, Aaron N.

Pope, Jodie G.

Wright, John D.

Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.))

Series:

NIST special publication ; 1170.

NIST special publication ; 1170

Language:

English

Subjects (All):

Metrology.

Microscopy.

Genre:

Technical reports.

Physical Description:

1 online resource (315 pages) : illustrations (black and white).

Place of Publication:

Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2014.

System Details:

text file

Notes:

"January 2014."

Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.

Title from PDF title page (viewed February 6, 2014).

Includes bibliographical references.

OCLC:

870343714

Publisher Number:

GOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db

Access Restriction:

Open Access Unrestricted online access