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Interlaboratory study on linewidth measurements for antireflective chromium photomasks / John M. Jerke, M. Carroll Croarkin, Ruth N. Varner.
- Format:
- Book
- Government document
- Author/Creator:
- Jerke, John M., author.
- Series:
- NBS special publication ; 400-74.
- NBS special publication ; 400-74
- Language:
- English
- Genre:
- Technical reports.
- Physical Description:
- 1 online resource.
- Place of Publication:
- Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1982.
- System Details:
- text file
- Notes:
- 1982.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Includes bibliographical references.
- OCLC:
- 927169558
- Publisher Number:
- GOVPUB-C13-030182d2a321d023d36c20ba7cdecd97
- Access Restriction:
- Open Access Unrestricted online access
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